Screen LibraryMEMS：a practical guide to design, analysis, and applications
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| Corporate Authors: | |
|---|---|
| Group Author: | ; ; |
| Published: |
W. Andrew Pub. Springer,
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| Publisher Address: | Norwich, NY Heidelberg, Germany |
| Publication Dates: | c2006. |
| Literature type: | Book |
| Language: | English |
| Subjects: | |
| Online Access: |
http://dx.doi.org/10.1007/978-3-540-33655-6 |
| Carrier Form: | 1 online resource (xxv, 965 p.): ill. |
| ISBN: |
0815514972 (William Andrew : alk. paper) 9780815514978 (William Andrew : alk. paper) 3540211179 (Springer-Verlag) 9783540211174 (Springer-Verlag) 9780815518259 (electronic bk.) 0815518250 (electronic bk.) 9783540336556 3540336559 |
| Index Number: | TM38 |
| CLC: | TM38 |
| Contents: |
"Micro-electro-mechanical systems"--Cover. Includes bibliographical references and index. |