Physics of submicron devices
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Main Authors: | |
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Group Author: | |
Published: |
Plenum Press,
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Publisher Address: | New York |
Publication Dates: | c1991. |
Literature type: | Book |
Language: | English |
Series: |
Microdevices : physics and fabrication technologies |
Subjects: | |
Carrier Form: | xiii, 402 p.: ill. ; 26 cm. |
ISBN: | 0306438437 |
Index Number: | O47 |
CLC: | O47 |
Call Number: | O47/F399/ |
Contents: | Includes bibliographical references and index. |