Submicron lithography
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Corporate Authors: | ; ; |
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Group Author: | |
Published: |
International Society for Optical Engineering,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | 1982. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE--the International Society for Optical Engineering ; v. 333 |
Subjects: | |
Carrier Form: | viii, 179 p.: ill. ; 28 cm. |
ISBN: | 0892523689 (pbk.) |
Index Number: | TS82 |
CLC: | TS82-532 |
Call Number: | TS82-53/S941/ |
Contents: | Includes bibliographical references and indexes. |