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Laser diagnostics and photochemical processing for semiconductor devices：symposium held November 1982 in Boston, Massachusetts, U.S.A.

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Bibliographic Details
Corporate Authors: United States. Air Force. Office of Scientific Research
Group Author: Osgood R. M; Brueck S. R. J; Schlossberg H. R
Published: North-Holland,
Publisher Address: New York
Publication Dates: c1983.
Literature type: Book
Language: English
Series: Materials Research Society symposia proceedings ; v. 17
Subjects:
Lasers > Industrial applications > Congresses
Semiconductors > Congresses
Carrier Form: xiii, 298 p.: ill. ; 24 cm.
ISBN: 0444007822
Index Number: TN303
CLC: TN303-532
Call Number: TN303-53/L343.1
Contents: "Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
Includes bibliographical references and indexes.

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