Photomask technology 2012:11-13 September 2012, Monterey, California, United States
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Corporate Authors: | |
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Group Author: | ; |
Published: |
SPIE,
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Publisher Address: | Bellingham |
Publication Dates: | [2012] |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; volume 8522 |
Subjects: | |
Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
ISBN: |
0819492604 (paperback) 9780819492609 (paperback) |
Index Number: | TN305 |
CLC: | TN305.7-532 |
Call Number: | TN305.7-532/S989-2/2012 |
Contents: | Includes bibliographical references and index. |