Screen LibraryPhotomask technology 2012：11-13 September 2012, Monterey, California, United States
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| Corporate Authors: | |
|---|---|
| Group Author: | ; |
| Published: |
SPIE,
|
| Publisher Address: | Bellingham |
| Publication Dates: | [2012] |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings of SPIE ; volume 8522 |
| Subjects: | |
| Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
| ISBN: |
0819492604 (paperback) 9780819492609 (paperback) |
| Index Number: | TN305 |
| CLC: | TN305.7-532 |
| Call Number: | TN305.7-532/S989-2/2012 |
| Contents: | Includes bibliographical references and index. |