Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /

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Bibliographic Details
Main Authors: Bhattacharyya, Bijoy
Published: William Andrew, an imprint of Elsevier,
Publisher Address: Oxford, UK :
Publication Dates: [2015]
Literature type: Book
Language: English
Series: Micro & nano technologies
Subjects:
Carrier Form: xxv, 270 pages : illustrations ; 25 cm.
Bibliography: Includes bibliographical references and index.
ISBN: 9780323327374 :
0323327370
Index Number: TJ1191
CLC: TB383
TM38
Call Number: TM38/B575