Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /
Saved in:
Main Authors: | |
---|---|
Published: |
William Andrew, an imprint of Elsevier,
|
Publisher Address: | Oxford, UK : |
Publication Dates: | [2015] |
Literature type: | Book |
Language: | English |
Series: |
Micro & nano technologies
|
Subjects: | |
Carrier Form: | xxv, 270 pages : illustrations ; 25 cm. |
Bibliography: | Includes bibliographical references and index. |
ISBN: |
9780323327374 : 0323327370 |
Index Number: | TJ1191 |
CLC: |
TB383 TM38 |
Call Number: | TM38/B575 |