VLSI science and technology/1984:materials for high speed/high density applications : proceedings of the Second International Symposium on Very Large Scale Integration Science and Technology

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Bibliographic Details
Corporate Authors: International Symposium on Very Large Scale Integration Science and Technology (2nd 1984 Cincinnati, Ohio; Electrochemical Society. Electronics Division; Electrochemical Society. Dielectrics and Insulation Division
Group Author: Bean Kenneth E; Rozgonyi George A
Published: Electrochemical Society,
Publisher Address: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Publication Dates: c1984.
Literature type: Book
Language: English
Series: Proceedings / The Electrochemical Society ; v. 84-7
Subjects:
Carrier Form: viii, 512 p.: ill. ; 23 cm.
Index Number: TN47
CLC: TN47-532
Contents: Includes bibliographies and indexes.