Screen LibraryHandbook of VLSI microlithography：principles, technology, and applications
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| Group Author: | |
|---|---|
| Published: |
Noyes Publications William Andrew Pub.,
|
| Publisher Address: | Park Ridge, N.J. Norwich, N.Y. |
| Publication Dates: | c2001. |
| Literature type: | Book |
| Language: | English |
| Edition: | 2nd ed. |
| Series: |
Materials science and processing technology series |
| Subjects: | |
| Carrier Form: | xxi, 1001 p.: ill. ; 24 cm. |
| ISBN: | 0815514441 (hc.) |
| Index Number: | TN47 |
| CLC: |
TN47-62 TN41-62 |
| Call Number: | TN47-62/H236/2ne.ed. |
| Contents: | Includes bibliographical references and index. |