Impurity doping processes in silicon /
This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many te...
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Corporate Authors: | |
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Group Author: | |
Published: |
North Holland,
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Publisher Address: | [Place of publication not identified] : |
Publication Dates: | 1981. |
Literature type: | eBook |
Language: | English |
Series: |
Materials processing, theory and practices ;
[volume 2] |
Subjects: | |
Online Access: |
http://www.sciencedirect.com/science/bookseries/0167790X/2 |
Summary: |
This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many texts, this work describes the double-diffusion method. |
Item Description: | Title from publisher supplied information (viewed Nov. 30, 2012). |
Carrier Form: | 1 online resource (vii, 643 pages). |
ISBN: |
0444860959 9780444860958 |
Index Number: | TK7871 |
CLC: | TN305.3 |