Semiconductor measurement technology : spreading resistance analysis for silicon layers with nonuniform resistivity /

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Bibliographic Details
Main Authors: Dickey, David H (Author)
Group Author: Ehrstein, James R
Published: U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. G.P.O.,
Publisher Address: Washington :
Publication Dates: 1979.
Literature type: Book
Language: English
Series: NBS special publication ; 400-48
Subjects:
Item Description: "This activity was supported by the Defense Advanced Research Projects Agency."
"Issued May 1979."
Carrier Form: vi, 65 pages : illustrations ; 26 cm.
Index Number: QC100
CLC: TN3
Call Number: TN3/D551