Semiconductor measurement technology : spreading resistance analysis for silicon layers with nonuniform resistivity /
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Main Authors: | |
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Group Author: | |
Published: |
U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. G.P.O.,
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Publisher Address: | Washington : |
Publication Dates: | 1979. |
Literature type: | Book |
Language: | English |
Series: |
NBS special publication ; 400-48 |
Subjects: | |
Item Description: |
"This activity was supported by the Defense Advanced Research Projects Agency." "Issued May 1979." |
Carrier Form: | vi, 65 pages : illustrations ; 26 cm. |
Index Number: | QC100 |
CLC: | TN3 |
Call Number: | TN3/D551 |