Screen LibraryLaser applications in microelectronic and optoelectronic manufacturing (LAMOM) XIX : 3-6 February 2014 San Francisco, California, United States /
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| Corporate Authors: | |
|---|---|
| Group Author: | ; ; ; |
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Washington : |
| Publication Dates: | [2014] |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings of SPIE,
volume 8967 & 8969 |
| Carrier Form: | 2 volumes in 1 book (various pagings) : illustrations (black and white) ; 28 cm. |
| Bibliography: | Includes bibliographical references and author index. |
| ISBN: |
9780819498809 (v. 8967 : paperback) : 0819498807 (v. 8967 : paperback) 9780819498823 (v. 8969 : paperback) |
| CLC: |
TN405-532 O572.31-532 TN249-532 |
| Call Number: | TN249-532/L343.5/2014 |