Screen LibraryReliability, packaging, testing, and characterization of MOEMS/MEMS, nanodevices, and nanomaterials XIII : 3-4 february 2014, San Francisco, California, United States /
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| Corporate Authors: | |
|---|---|
| Group Author: | ; |
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Washington : |
| Publication Dates: | [2014] |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings of SPIE,
volume 8975 |
| Subjects: | |
| Carrier Form: | 1 volume (various pagings) : illustrations (black and white) ; 28 cm. |
| Bibliography: | Includes bibliographical references and author index. |
| ISBN: |
9780819498885 (paperback) : 0819498882 (paperback) |
| CLC: | TN406-532 |
| Call Number: | TN406-532/R382/2014 |