Applied optical metrology IV : 1-5 August 2021, San Diego, California, United States /
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Corporate Authors: | ; |
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Group Author: | ; ; |
Published: |
SPIE,
|
Publisher Address: | Bellingham, Washington : |
Publication Dates: | [2021] |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE,
volume 11817 |
Subjects: | |
Item Description: | "At SPIE optical engineering + applications"--Cover. |
Carrier Form: | 1 volume (various pagings) : illustrations, forms ; 27 cm. |
Bibliography: | Includes bibliographical references. |
ISBN: | 9781510644724 |
CLC: | TB96-532 |
Call Number: | TB96-532/A652-1/2021 |