Applied optical metrology IV : 1-5 August 2021, San Diego, California, United States /

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Bibliographic Details
Corporate Authors: Applied Optical Metrology (Conference) San Diego, California, United States); SPIE (Society)
Group Author: Novak, Erik L. (Erik Lowell), 1971-; Trolinger, James D.; Wilcox, Christopher C.
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2021]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 11817
Subjects:
Item Description: "At SPIE optical engineering + applications"--Cover.
Carrier Form: 1 volume (various pagings) : illustrations, forms ; 27 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510644724
CLC: TB96-532
Call Number: TB96-532/A652-1/2021