Gettering and defect engineering in the semiconductor technology:proceedings of the 5th international autumn meeting, held in Chossewitz, near Frankfurt (Oder), Germany, Oct. 9-14, 1993

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Bibliographic Details
Group Author: Grimmeiss H. G; Kittler M. Martin; Richter H
Published: Scitec,
Publisher Address: Zurich
Publication Dates: c1993.
Literature type: Book
Language: English
Series: Solid state phenomena ; v. 32 & 33 (1993)
Carrier Form: xvii, 630 p.: ill. ; 25 cm.
ISBN: 3908450004
Index Number: TN3
CLC: TN3-532
Call Number: TN3-532/G394/1993/
Contents: Includes index.