Gettering and defect engineering in the semiconductor technology:proceedings of the 5th international autumn meeting, held in Chossewitz, near Frankfurt (Oder), Germany, Oct. 9-14, 1993
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Group Author: | ; ; |
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Published: |
Scitec,
|
Publisher Address: | Zurich |
Publication Dates: | c1993. |
Literature type: | Book |
Language: | English |
Series: |
Solid state phenomena ; v. 32 & 33 (1993) |
Carrier Form: | xvii, 630 p.: ill. ; 25 cm. |
ISBN: | 3908450004 |
Index Number: | TN3 |
CLC: | TN3-532 |
Call Number: | TN3-532/G394/1993/ |
Contents: | Includes index. |