Screen LibrarySpectroscopic characterization techniques for semiconductor technology III：14-15 March 1988, Newport Beach, California
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| Corporate Authors: | ; ; |
|---|---|
| Group Author: | ; ; |
| Published: |
The Society,
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| Publisher Address: | Bellingham, Wash., U.S.A. |
| Publication Dates: | c1988. |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings of SPIE--the International Society for Optical Engineering ; v. 946 |
| Subjects: | |
| Carrier Form: | viii, 234 p.: ill. ; 28 cm. |
| ISBN: | 0892529814 |
| Index Number: | TN3 |
| CLC: | TN3-532 |
| Call Number: | TN3-53/S741/1988 |
| Contents: | Includes bibliographies and index. |