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Silicon processing：a symposium sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982

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Bibliographic Details
Corporate Authors: ASTM Committee F-1 on Electronics.; United States. National Bureau of Standards.; Stanford University.; Symposium on Silicon Processing (1982 San Jose, Calif.) (San Jose, Calif.))
Group Author: Gupta D. C.; (Dinesh C.)
Published: ASTM,
Publisher Address: Philadelphia, Pa. (1916 Race St., Philadelphia 19103)
Publication Dates: c1983.
Literature type: Book
Language: English
Series: ASTM special technical publication ; 804
Subjects:
Silicon > Congresses.
Semiconductors > Congresses.
Carrier Form: 559 p.: ill. ; 24 cm.
Index Number: TN47
CLC: TN47-532
Contents: Papers presented at the Symposium on Silicon Processing, held in San Jose, Calif., Jan 19-22, 1982.
"ASTM publication code number (PCN) 04-804000-46."
Includes bibliographical references and index.

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