Silicon processing:a symposium sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982
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Corporate Authors: | ; ; ; |
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Group Author: | ; |
Published: |
ASTM,
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Publisher Address: | Philadelphia, Pa. (1916 Race St., Philadelphia 19103) |
Publication Dates: | c1983. |
Literature type: | Book |
Language: | English |
Series: |
ASTM special technical publication ; 804 |
Subjects: | |
Carrier Form: | 559 p.: ill. ; 24 cm. |
Index Number: | TN47 |
CLC: | TN47-532 |
Contents: |
Papers presented at the Symposium on Silicon Processing, held in San Jose, Calif., Jan 19-22, 1982. "ASTM publication code number (PCN) 04-804000-46." Includes bibliographical references and index. |