High power impulse magnetron sputtering : fundamentals, technologies, challenges and applications /
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Corporate Authors: | |
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Group Author: | ; ; |
Published: |
Elsevier,
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Publisher Address: | Amsterdam, Netherlands : |
Publication Dates: | 2020. |
Literature type: | eBook |
Language: | English |
Subjects: | |
Online Access: |
https://www.sciencedirect.com/science/book/9780128124543 |
Item Description: | Includes index. |
Carrier Form: | 1 online resource (384 pages) |
Index Number: | TK7871 |
CLC: | TN123 |