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VLSI planarization：methods, models, implementation

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Bibliographic Details
Main Authors: Feinberg V
Group Author: Rabinovich E; Levin A
Published: Kluwer Academic,
Publisher Address: Dordrecht
Publication Dates: 1997.
Literature type: Book
Language: English
Series: Mathematics and its applications ; v. 399
Subjects:
Integrated circuits > Very large scale integration > Mathematical models
Integrated circuits > Very large scale integration > Design and construction
Carrier Form: vi, 184 p.: ill. ; 25 cm.
ISBN: 079234510X (alk. paper)
Index Number: TN470
CLC: TN470.2
Call Number: TN470.2/F299/
Contents: Includes bibliographical references (p. 173-179) and index.

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