Cover is for reference only

Advances in metrology for X-ray and EUV optics V : 18 August 2014, San Diego, California, United States /

Saved in:
Bibliographic Details
Corporate Authors: SPIE Society
Group Author: Assoufid, Lahsen; Ohashi, Haruhiko; Asundi, Anand
Published: SPIE,
Publisher Address: Bellingham :
Publication Dates: [2014]
Literature type: Book
Language: English
Series: Proceedings of SPIE ; volume 9206
Subjects:
Optical measurements > Congresses
Optical instruments > Design and construction > Congresses
Measuring instruments > Design and construction > Congresses
Laser interferometers > Congresses
Measurement > Congresses
Metrology
EUV optics
Carrier Form: 1 volume (various pagings) : illustrations (black and white) ; 28 cm.
Bibliography: Includes bibliographical references and index.
ISBN: 9781628412338 (paperback) :
162841233X (paperback)
CLC: O439-532
TB96-532
Call Number: TB96-532/A244-1/2014

Related Book Recommendations