Advances in metrology for X-ray and EUV optics V : 18 August 2014, San Diego, California, United States /
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Corporate Authors: | |
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Group Author: | ; ; |
Published: |
SPIE,
|
Publisher Address: | Bellingham : |
Publication Dates: | [2014] |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ;
volume 9206 |
Subjects: | |
Carrier Form: | 1 volume (various pagings) : illustrations (black and white) ; 28 cm. |
Bibliography: | Includes bibliographical references and index. |
ISBN: |
9781628412338 (paperback) : 162841233X (paperback) |
CLC: |
O439-532 TB96-532 |
Call Number: | TB96-532/A244-1/2014 |