Screen LibraryPlasma processing of semiconductors
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| Corporate Authors: | ; |
|---|---|
| Group Author: | ; |
| Published: |
Kluwer Academic Publishers,
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| Publisher Address: | Dordrecht |
| Publication Dates: | c1997. |
| Literature type: | Book |
| Language: | English |
| Series: |
NATO ASI series. Series E., Applied sciences ; vol. 336 |
| Subjects: | |
| Carrier Form: | x, 613 p.: ill. ; 25 cm. |
| ISBN: | 0792345673 (acid-free paper) |
| Index Number: | TN305 |
| CLC: | TN305-532 |
| Call Number: | TN305-532/P715/1996/ |
| Contents: |
"Proceedings of the NATO Advanced Study Institute on Plasma Processing of Semiconductors, Château de Bonas, France, 17-18 June, 1996"--T.p. verso. "Published in cooperation with the NATO Scientific Affairs Division." Includes bibliographical references and index. |