VLSI electronics microstructure science
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Published: |
Academic Press,
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Publisher Address: | Orlando |
Publication Dates: | 19 - |
Literature type: | Book |
Language: | English |
Subjects: | |
Carrier Form: | v.: ill. |
ISBN: | 0122341155 |
Index Number: | TN47 |
CLC: | TN47 |
Call Number: | TN47/V871/ |
Contents: | v.15: VLSI metallization. -- 1987. -- x, 480 p. |