VLSI electronics microstructure science

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Bibliographic Details
Published: Academic Press,
Publisher Address: Orlando
Publication Dates: 19 -
Literature type: Book
Language: English
Subjects:
Carrier Form: v.: ill.
ISBN: 0122341155
Index Number: TN47
CLC: TN47
Call Number: TN47/V871/
Contents: v.15: VLSI metallization. -- 1987. -- x, 480 p.