2000 5th International Symposium on Plasma Process-Induced Damage:May 22-24, 2000, Santa Clara, California, USA
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Corporate Authors: | ; ; ; |
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Group Author: | ; ; |
Published: |
Northern California Chapter of the American Vacuum Society,
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Publisher Address: | Santa Clara, California |
Publication Dates: | c2000. |
Literature type: | Book |
Language: | English |
Subjects: | |
Carrier Form: | [6], i, 172 p.: ill. ; 28 cm. |
ISBN: | 0965157741 |
Index Number: | TN405 |
CLC: | TN405.98-532 |
Call Number: | TN405.98-532/I61/2000 |
Contents: |
PID--cover. "IEEE Catalog Number 00TH8479"--verso of T.p. Includes bibliographic references and author index. |