Screen LibraryVLSI electronics：microstructure science
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| Group Author: | ; ; |
|---|---|
| Published: |
Academic Press,
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| Publisher Address: | New York |
| Publication Dates: | 1981-c1993. |
| Literature type: | Book |
| Language: | English |
| Subjects: | |
| Carrier Form: | v.: ill. ; 24 cm. |
| ISBN: | 0122341015 (v. 1 : alk. paper) |
| Index Number: | TN47 |
| CLC: | TN47 |
| Contents: |
v.13: Metal-semiconductor contacts and devices Beginning with vol. 6, some vols. edited by Norman G. Einspruch with other editors. Includes bibliographies and indexes. v. 1-5. [without special titles] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface and interface effects in VLSI -- v. 11. GaAs microelectronics -- v. 12. Silicon materials -- v. 13. Metal-semiconductor contacts and devices -- v. 14. VLSI design -- v. 15. VLSI metallization -- v. 16. Lithography for VLSI -- v. 17. VLSI in medicine -- v.18. Advanced MOS device physics -- 19. Advanced CMOS process technology -- v. 21. Beam processing technologies -- v. 22. VLSI reliability -- v |