Screen LibraryChemical vapor deposition：principles and applications
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| Group Author: | ; |
|---|---|
| Published: |
Academic Press,
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| Publisher Address: | London San Diego |
| Publication Dates: | c1993. |
| Literature type: | Book |
| Language: | English |
| Subjects: | |
| Carrier Form: | v, 677 p.: ill. ; 24 cm. |
| ISBN: | 0123496705 |
| Index Number: | TQ026 |
| CLC: | TQ026 |
| Call Number: | TQ026/C517/ |
| Contents: | Includes bibliographical references and index. |