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Advances in metrology for X-ray and EUV optics X : 22 August 2023, San Diego, California, United States /

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Bibliographic Details
Corporate Authors: Advances in Metrology for X-Ray and EUV Optics (Conference)‏ San Diego, California, United States); SPIE (Society)
Group Author: Assoufid, Lahsen (Editor); Ohashi, Haruhiko (Editor); Siewert, Frank (Editor)
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2023]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 12695
Subjects:
Optical measurements > Congresses.
Optical instruments > Design and construction > Congresses.
Measuring instruments > Design and construction > Congresses.
Laser interferometers > Congresses.
Measurement > Congresses.
Item Description: "At SPIE optics engineering + applications"--Cover.
Carrier Form: 1 volume (various pagings) : illustrations ; 27 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510666047
CLC: O439-532
TB96-532
Call Number: TB96-532/A244-1/2023

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