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Literature type: Book

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Gettering and defect engineering in semiconductor technology XIII：GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Dölnsee-Schorfheide, north of Berlin, Germany, September 26-October 02, 2009/

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Bibliographic Details
Corporate Authors: International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" (13th 2009 Dölnsee-Schorfheide, Germany
Group Author: Richter H 1940-; Kittler Martin
Published: Trans Tech Publications,
Publisher Address: Stafa-Zuerich, Switzerland
Publication Dates: c2010.
Literature type: Book
Language: English
Series: Solid state phenomena ; v. 156-158
Subjects:
Solid state electronics
Semiconductors
Carrier Form: xiv, 592 p.: ill. ; 25 cm.
ISBN: 9783908451747 (pbk.)
3908451744
Index Number: TN3
CLC: TN3-532
Call Number: TN3-532/G394/2009
Contents: Includes bibliographical references and index.

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