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Glancing angle deposition of thin films : engineering the nanoscale /

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Bibliographic Details
Main Authors: Hawkeye, Matthew M
Group Author: Taschuk, Michael T; Brett, Michael J
Published: Wiley,
Publisher Address: Chichester, West Sussex, United Kingdom :
Publication Dates: [2014]
Literature type: eBook
Language: English
Series: Wiley series in materials for electronic and optoelectronic applications
Subjects:
Nanotechnology
Chemical vapor deposition
Nanoelectromechanical systems > Design and construction
TECHNOLOGY & ENGINEERING / Mechanical
Electronic books
Online Access: http://onlinelibrary.wiley.com/book/10.1002/9781118847510
Carrier Form: 1 online resource.
Bibliography: Includes bibliographical references and index.
ISBN: 9781118847336 (ePub)
1118847334 (ePub)
9781118847329 (Adobe PDF)
1118847326 (Adobe PDF)
9781118847510 (electronic bk.)
1118847512 (electronic bk.)
Index Number: T174
CLC: TB383

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