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Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications：24 October, 1995, Austin, Texas

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Bibliographic Details
Corporate Authors: National Institute of Standards and Technology U.S; Society of Photo-Optical Instrumentation Engineers; Semiconductor Equipment and Materials International
Group Author: Motamedi M. Edward; Luo Fang-Chen; Bailey Wayne E
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c1995.
Literature type: Book
Language: English
Series: Proceedings / SPIE--the International Society for Optical Engineering ; v. 2641
Subjects:
Microelectromechanical systems > Congresses
Optoelectronics > Congresses
Microelectronics > Congresses
Carrier Form: v, 154 p.: ill. ; 28 cm.
ISBN: 0819420077
Index Number: TN201
CLC: TN201-532
TP37-532
TN403-532
Call Number: TN403-532/M626/1995
Contents: Includes bibliographical references and index.

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