Cover is for reference only

MOEMS display and imaging systems：28-29 January 2003, San Jose, California, USA

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Bibliographic Details
Corporate Authors: Semiconductor Equipment and Materials International; Solid State Technology Organization; Sandia National Laboratories; Society of Photo-Optical Instrumentation Engineers
Group Author: Urey Hakan 1970-
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2003.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4985
Subjects:
Imaging systems > Design and construction
Scanning systems > Design and construction
Optics, Adaptive
Microelectromechanical systems
Carrier Form: xlii, 306 p.: ill. ; 28 cm.
ISBN: 0819447854
Index Number: TN873
CLC: TN873-532
TN27-532
TM38-532
TN403-532
Call Number: TN27-532/M626/2003
Contents: Includes bibliographical references and index.

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