Chemical vapor deposition of refractory metals and ceramics III:symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.

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Bibliographic Details
Corporate Authors: Materials Research Society
Group Author: Lee Woo Y; Pickering Michael A; Gallois Bernard M
Published: Materials Research Society,
Publisher Address: Pittsburgh, Pa.
Publication Dates: c1995.
Literature type: Book
Language: English
Series: Materials Research Society symposium proceedings ; v. 363
Subjects:
Carrier Form: xi, 284 p.: ill. ; 24 cm.
ISBN: 1558992642
Index Number: TB304
CLC: TB304-532
Call Number: TB304-53/C517.2/1994
Contents: Includes bibliographical references and index.