Chemical vapor deposition of refractory metals and ceramics III:symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.
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Corporate Authors: | |
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Group Author: | ; ; |
Published: |
Materials Research Society,
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Publisher Address: | Pittsburgh, Pa. |
Publication Dates: | c1995. |
Literature type: | Book |
Language: | English |
Series: |
Materials Research Society symposium proceedings ; v. 363 |
Subjects: | |
Carrier Form: | xi, 284 p.: ill. ; 24 cm. |
ISBN: | 1558992642 |
Index Number: | TB304 |
CLC: | TB304-532 |
Call Number: | TB304-53/C517.2/1994 |
Contents: | Includes bibliographical references and index. |