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Spectroscopic ellipsometry principles and applications /

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Bibliographic Details
Main Authors: Fujiwara, Hiroyuki
Corporate Authors: Wiley InterScience Online service
Published:
Literature type: Electronic eBook
Language: English
Subjects:
Ellipsometry
Spectrum analysis
Materials > Optical properties
SCIENCE > Nanoscience
Electronic books
Online Access: http://onlinelibrary.wiley.com/book/10.1002/9780470060193
Carrier Form: 1 online resource (xviii, 369 pages) : illustrations
Bibliography: Includes bibliographical references and index.
ISBN: 9780470060193
0470060190
9780470060186 (electronic bk.)
0470060182 (electronic bk.)
Index Number: QC443
CLC: O436.3
Contents: Introduction to spectroscopic ellipsometry -- Principles of optics -- Polarization of light -- Principles of spectroscopic ellipsometry -- Data analysis -- Ellipsometry of anisotropic materials -- Data analysis examples -- Real-time monitoring by spectroscopic ellipsometry.

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