VLSIの薄膜技術
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Main Authors: | ; ; |
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Published: |
丸善
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Publisher Address: | 東京 |
Publication Dates: | 1986.9 |
Literature type: | Book |
Language: | Japanese |
Series: |
電子材料シリーズ |
Subjects: | |
Carrier Form: | xii, 250p: 図表 ; 22cm |
ISBN: | 4621031120 |
Index Number: | TN47 |
CLC: | TN47 |
Call Number: | WJTN47/2247 |
Contents: | 各章末:文献 |