Screen LibraryAnalytical techniques for semiconductor materials and process characterization 6：(ALTECH 2009) ; [Symposium on "Analytical Techniques for Semiconductor Materials and Process Characterization VI" was held at the 216th meeting of the Electrochemical Society in Vienna from October 4 to 9, 2009]
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| Corporate Authors: | ; ; |
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| Group Author: | |
| Published: |
Electrochemical Soc.,
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| Publisher Address: | Pennington, NJ |
| Publication Dates: | 2009. |
| Literature type: | Book |
| Language: | English |
| Series: |
ECS transactions ; 25,3 |
| Carrier Form: | X, 465 p.: ill. ; 23 cm. |
| ISBN: |
9781566777407 1566777402 |
| Index Number: | TN304 |
| CLC: | TN304-532 |
| Call Number: | TN304-532/A532/2009 |
| Contents: | Includes bibliographical references and index. |