Mechanical microsensors

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Bibliographic Details
Main Authors: Elwenspoek M (Miko), 1948-
Group Author: Wiegerink Remco J 1964-
Published: Springer,
Publisher Address: New York
Publication Dates: 2000.
Literature type: Book
Language: English
Series: Microtechnology and MEMS
Subjects:
Carrier Form: x, 295 p.: ill. ; 24 cm.
ISBN: 3540675825 (alk. paper)
Index Number: TM38
CLC: TM38
TP212.102
TP212.05
Call Number: TP212.102/E522
Contents: Includes bibliographical references and index.