Screen LibraryProceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
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| Corporate Authors: | ; ; |
|---|---|
| Group Author: | |
| Published: |
Electrochemical Society,
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| Publisher Address: | Pennington, NJ |
| Publication Dates: | c1998. |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings ; v. 97-35 |
| Subjects: | |
| Carrier Form: | xiii, 650 p.: ill. ; 24 cm. |
| ISBN: | 1566771889 |
| Index Number: | TN305 |
| CLC: | TN305.97-532 |
| Call Number: | TN305.97-532/I61/1997 |
| Contents: |
"The Fifth International Symposium of Cleaning Technology in Semiconductor Device Manufacturing was held diring the Fall Meeting [192th] of the Electrochemical Society in Paris [France] in September 1997."--Preface. Includes bibliographical references and indexes. |