Screen LibraryLaser applications in microelectronic and optoelectronic manufacturing VII：26-29 January 2009, San Jose, California, United States
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| Corporate Authors: | |
|---|---|
| Group Author: | |
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Wash. |
| Publication Dates: | c2009. |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings of SPIE ; v. 7201 |
| Subjects: | |
| Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
| ISBN: |
9780819474476 (pbk.) 0819474479 |
| Index Number: | TN405 |
| CLC: |
TN405-532 TN249-532 |
| Call Number: | TN249-532/L343.5/2009 |
| Contents: | Includes bibliographical references and index. |