Screen LibraryMEMS/MOEMS：advances in photonic communications, sensing, metrology, packaging and assembly : 28-29 October 2002, Brugge, Belgium
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| Corporate Authors: | ; |
|---|---|
| Group Author: | |
| Published: |
SPIE,
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| Publisher Address: | Bellingham, Wash., USA |
| Publication Dates: | c2003. |
| Literature type: | Book |
| Language: | English |
| Series: |
SPIE proceedings series ; v. 4945 |
| Subjects: | |
| Carrier Form: | vii, 203 p.: ill. ; 28 cm. |
| ISBN: | 0819447404 |
| Index Number: | TN2 |
| CLC: |
TN2-532 TN25-532 |
| Call Number: | TN25-532/M626-3/2002 |
| Contents: | Includes bibliographical references and index. |