Tungsten and other refractory metals for VLSI applications IV:proceedings of the 1988 Workshop held Oct. 4-6, 1988, Albuquerque, New Mexico, USA
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Group Author: | ; |
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Published: |
Materials Research Society,
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Publisher Address: | Pittsburgh, Pa. |
Publication Dates: | c1989. |
Literature type: | Book |
Language: | English |
Series: |
Materials Research Society conference proceedings |
Subjects: | |
Carrier Form: | xv, 373 p.: ill. ; 24 cm. |
ISBN: | 0931837987 |
Index Number: | TN47 |
CLC: | TN47-532 |