Tungsten and other refractory metals for VLSI applications IV:proceedings of the 1988 Workshop held Oct. 4-6, 1988, Albuquerque, New Mexico, USA

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Bibliographic Details
Group Author: Blewer Robert S; McConica Carol M
Published: Materials Research Society,
Publisher Address: Pittsburgh, Pa.
Publication Dates: c1989.
Literature type: Book
Language: English
Series: Materials Research Society conference proceedings
Subjects:
Carrier Form: xv, 373 p.: ill. ; 24 cm.
ISBN: 0931837987
Index Number: TN47
CLC: TN47-532