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MEMS/MOEMS components and their applications III：23-25 January 2006, San Jose, California, USA

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Bibliographic Details
Corporate Authors: National Science Foundation U.S.. Center for Adaptive Optics; Society of Photo-Optical Instrumentation Engineers
Group Author: Tadigadapa Srinivas A; Henning Albert Karl; Olivier Scot S
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2006.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 6113
Subjects:
Optoelectronic devices
Microelectromechanical systems
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 0819461555
Call Number: TN4-532/M626.1/2006
Contents: Includes bibliographical references and author index.

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