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Nanoscaled semiconductor-on-insulator materials, sensors and devices：selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine

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Bibliographic Details
Corporate Authors: International Workshop on Semiconductor-on-Insulator Materials and Devices (6th 2010 Kiev, Ukraine)
Group Author: (Alexei N.); Raskin J.-P.; (Jean-Pierre), 1971-; Nazarov A. N.
Published: Trans Tech,
Publisher Address: Durnten-Zurich, Switzerland Enfield, NH
Publication Dates: c2011.
Literature type: Book
Language: English
Series: Advanced materials research ; v. 276
Subjects:
Silicon-on-insulator technology.
Nanoelectromechanical systems.
Nanotechnology.
Semiconductors
Carrier Form: x, 206 p.: ill. ; 25 cm.
ISBN: 9783037851784
3037851783
Index Number: TB383
CLC: TB383-532
TN104.2-532
Call Number: TN104.2-532/I618/2010
Contents: Includes bibliographical references and index.

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