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Instrumentation, metrology, and standards for nanomanufacturing：29-30 August 2007, San Diego, California, USA

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Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Allgair John; Postek Michael T
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2007.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 6648
Subjects:
Microfabrication
Nanotechnology
Nanostructured materials
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 9780819467966
0819467960
Index Number: TB4
CLC: TB4-532
TB383-532
Call Number: TB383-532/I599/2007
Contents: Includes bibliographical references and author index.

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