Commercial applications of precision manufacturing at the sub-micron level, 19-21 November 1991, London, United Kingdom
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Group Author: | |
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Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c1992. |
Literature type: | Book |
Language: | English |
Series: |
SPIE proceedings series ; v. 1573 |
Carrier Form: | 237 p.: ; 28 cm. |
ISBN: | 0819407038 (pbk.) |
Index Number: | TH16 |
CLC: | TH16-532 |