Screen LibraryCommercial applications of precision manufacturing at the sub-micron level, 19-21 November 1991, London, United Kingdom
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| Group Author: | |
|---|---|
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Wash. |
| Publication Dates: | c1992. |
| Literature type: | Book |
| Language: | English |
| Series: |
SPIE proceedings series ; v. 1573 |
| Carrier Form: | 237 p.: ; 28 cm. |
| ISBN: | 0819407038 (pbk.) |
| Index Number: | TH16 |
| CLC: | TH16-532 |