Screen Library外延生长技术
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| Main Authors: | ; |
|---|---|
| Published: |
国防工业出版社
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| Publisher Address: | 北京 |
| Publication Dates: | 1992 |
| Literature type: | Book |
| Language: | Chinese |
| Subjects: | |
| Carrier Form: | 482页: ; 20cm |
| ISBN: | 7-118-00918-0 |
| Index Number: | TN304 |
| CLC: | TN304.054 |
| Call Number: | TN304.054/4948 |
| Contents: |
国防科技图书出版基金资助 共包括:外延生长概述,衬底的制备、气相外延生长、硅气相外延生长、液相外延生长、固相外延生长、异质外延生长等内容。 |