Photomask and next-generation lithography mask technology X:16-18 April, 2003, Yokohama, Japan
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Corporate Authors: | ; ; |
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Group Author: | |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2003. |
Literature type: | Book |
Language: | English |
Series: |
SPIE proceedings series ; v. 5130 |
Subjects: | |
Carrier Form: | xxi, 1066 p.: ill. (some col.) ; 28 cm. |
ISBN: | 0819449962 |
Index Number: | TN405 |
CLC: |
TN405.7-532 TN305.7-532 |
Call Number: | TN305.7-532/P757/2003 |
Contents: |
Some earlier proceedings have title: Photomask and X-ray mask technology. Includes bibliographical references and author index. |