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Proceedings of the Second International Symposium on Process Physics and Modeling in Semiconductor Technology

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Bibliographic Details
Corporate Authors: International Symposium on Process Physics and Modeling in Semiconductor Technology (2nd 1990 Montréal, Québec; Electrochemical Society. Electronics Division; Electrochemical Society. Dielectric Science and Technology Division
Group Author: Pantelides Sokrates T; Srinivasan G. R; Plummer J
Published: Electrochemical Society,
Publisher Address: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Publication Dates: c1991.
Literature type: Book
Language: English
Series: Proceedings / Electrochemical Society ; v. 91-4
Subjects:
Semiconductors > Mathematical models
Carrier Form: x, 800 p.: ill. ; 23 cm.
Index Number: TN305
CLC: TN305-532
Call Number: TN305-532/I61.1/1990
Contents: Spine title: Process physics and modeling in semiconductor technology.
"Electronics and Dielectric Science and Technology Divisions."
Papers from a symposium held in Montreal, Quebec, May 1990.
Includes bibliographical references and indexes.

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