Optical metrology and inspection for industrial applications:18-20 October 2010,

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Bibliographic Details
Corporate Authors: Zhongguo guang xue xue hui; Beijing gong ye xue yuan; Zhongguo ke xue ji shu xie hui; Guo jia zi ran ke xue ji jin wei yuan hui China; China. Guo jia ke xue ji shu bu; SPIE Society
Group Author: Huang Peisen S; Yoshizawa Tōru 1939-; Harding Kevin G
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2010.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 7855
Subjects:
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 0819483850
9780819483850
Index Number: TB96
CLC: TB96-532
TB133-532
Call Number: TB96-532/O626-4/2010
Contents: Includes bibliographical references and author index.