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CLC: P - 天文学、地球科学

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Modeling aspects in optical metrology II：15-16 June 2009, Munich, Germany

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Bibliographic Details
Corporate Authors: European Optical Society; Wissenschaftliche Gesellschaft Lasertechnik; SPIE Society; SPIE Europe
Group Author: Bodermann Bernd; Silver Richard M; Bosse Harald
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: 2009.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 7390
Subjects:
Integrated circuits
Semiconductors > Design and construction
Optical measurements
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 9780819476739
0819476730
Index Number: O432
CLC: O432.2-532
TN4-532
Call Number: O432.2-532/M689/2009
Contents: Includes bibliographical references and author index.

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