Modeling aspects in optical metrology II:15-16 June 2009, Munich, Germany
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Corporate Authors: | ; ; ; |
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Group Author: | ; ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | 2009. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 7390 |
Subjects: | |
Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
ISBN: |
9780819476739 0819476730 |
Index Number: | O432 |
CLC: |
O432.2-532 TN4-532 |
Call Number: | O432.2-532/M689/2009 |
Contents: | Includes bibliographical references and author index. |